标准摘要
[中文适用范围]： IEC 62047 的这一部分定义了微机电设备的术语，包括此类设备的生产过程。 [外文原描述]： This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions