标准摘要
[中文适用范围]： IEC 62047 的这一部分规定了微柱压缩测试方法，以高精度@可重复性@和适度的样本制作工作来测量 MEMS 材料的压缩特性。测量试样的单轴压缩应力-应变关系，可以获得压缩弹性模量和屈服强度。试件是采用微机械加工技术@在刚性（或高刚性）基材上加工而成的圆柱柱，其长径比（柱直径与柱高度之比）应大于3。本标准适用于金属@陶瓷@和高分子材料。 [外文原描述]： IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. This standard is applicable to metallic, ceramic, and polymeric materials. The contents of the corrigendum of February 2012 have been included in this copy.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials