标准摘要
[中文适用范围]： IEC 62047的本部分规定了测量长度在0@1mm到1mm之间的薄独立固体（金属@陶瓷@聚合物等）微机电系统（MEMS）材料的线性热膨胀系数（CLTE）的测试方法。 1 毫米，宽度在 10 ?? 之间和 1 毫米，厚度在 0@1 ?? 之间1mm@是MEMS@微机械等的主要结构材料。该测试方法适用于室温至材料熔化温度30%的温度范围内的CLTE测量。 [外文原描述]： IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems