半导体器件微机电器件第15部分：PDMS与玻璃结合强度的试验方法

[中文适用范围]： IEC 62047的这一部分描述了聚二甲基硅氧烷（PDMS）和玻璃之间的粘合强度的测试方法。硅基橡胶@ PDMS@ 用于构建采用光刻和复制成型工艺制造的基于芯片的微流体装置。粘合强度的问题主要针对高压应用，如在某些蠕动泵设计的情况下，其中片外压缩空气供应用于驱动由双层@形成的微通道中的流体，该双层是由玻璃与复制品之间的粘合形成的模制PDMS 和PDMS 与PDMS 之间的另一个。另外，在具有气动微型阀的系统的情况下，相对高水平的结合，特别是在两个PDMS复制模制层之间，变得非常必要。通常，接合区域之间的界面之间会存在泄漏和脱粘现象，这会导致MEMS器件的不稳定和寿命缩短。本标准规定了PDMS与玻璃芯片键合试验的通用程序 [外文原描述]： IEC 62047-15:2015 describes test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone-based rubber, PDMS, is used for building of chip-based microfluidic devices fabricated using lithography and replica moulding processes. The problem of bonding strength is mainly for high pressure applications as in the case of certain peristaltic pump designs where an off chip compressed air supply is used to drive the fluids in micro channels created by a twin layer, one formed by bondage between glass with replica moulded PDMS and another between PDMS and PDMS. Also, in case of systems having pneumatic microvalves, a relatively high level of bonding particularly between two replica moulded layers of PDMS becomes quite necessary. Usually there is a leakage and debonding phenomena between interface of bonded areas, which causes unstability and shortage of lifetime for MEMS devices. This standard specifies general procedures on bonding test of PDMS and glass chip.