标准摘要
[中文适用范围]： IEC 62047 的这一部分规定了对窗户内鼓起的自立式薄膜进行鼓胀测试的方法。该样品是用微纳米结构薄膜材料@制成的，包括金属@陶瓷和聚合物薄膜@，用于MEMS@微机械等。薄膜的厚度在0@1??范围内。矩形和正方形膜窗口的宽度和圆形膜的直径范围为0@5mm至4mm，至10μm@。测试是在环境温度@下对带有凸窗的测试薄膜样品施加均匀分布的压力来进行的。利用该方法可以测定薄膜材料的弹性模量和残余应力。 [外文原描述]： IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films