标准摘要
[中文适用范围]： IEC 62047的本部分规定了对长度和宽度小于10mm、厚度小于10?的薄膜微机电系统（MEMS）材料施加单轴和双轴载荷所获得的测试结果来确定泊松比。 ？。 [外文原描述]： IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials