半导体器件. 微型机电装置. 第26部分: 微槽和针孔结构的描述和测量方法

[中文适用范围]： IEC 62047的这一部分规定了微米尺度的沟槽结构和针结构的描述。此外，它还提供了两种结构的几何形状的测量示例。对于沟槽结构，本标准适用于深度为1μm至100μm的结构；墙壁和沟槽的宽度分别为 5 µm 至 150 µm；长宽比为 0,006 7 至 20。对于针状结构，该标准适用于具有三个或四个面、高度、水平宽度和垂直宽度为 2 µm 或更大，且尺寸适合边长为 100 的立方体的结构微米。本标准适用于MEMS的结构设计以及MEMS工艺后的几何评估。 [外文原描述]： IEC 62047-26:2016 specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 µm to 100 µm; walls and trenches with respective widths of 5 µm to 150 µm; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 µm or larger, and with dimensions that fit inside a cube with sides of 100 µm. This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.