标准摘要
[中文适用范围]： IEC 62047 的这一部分规定了振动驱动 MEMS 驻极体能量收集设备的术语和定义以及性能测试方法，以确定消费者、工业或任何应用的特征参数。本文件适用于振动驱动的驻极体能量收集装置，其电极间隙低于 1000 m，由带有俘获电荷的介电材料覆盖，并通过蚀刻、光刻或沉积等 MEMS 工艺制造。 [外文原描述]： IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices