标准摘要
[中文适用范围]： IEC 62047 的这一部分规定了一种松弛测试方法，用于在受控应变和室温下测量微机电系统 (MEMS) 的独立式导电薄膜的机电性能。独立式导电材料薄膜广泛应用于MEMS@光电子@和柔性/可穿戴电子产品。产品中的独立式薄膜会承受外部和内部应力，即使在室温下运行期间，这些应力也可能会松弛，这种松弛会导致产品电气性能随时间变化。该测试方法对于各向同性@均质@和线性粘弹性材料有效。 [外文原描述]： IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature