半导体器件.微机电设备.第3部分:拉伸试验的薄膜标准试验片

[中文适用范围]： 本国际标准规定了一种标准试件，用于保证长度和宽度在1mm以下、厚度在10μm以下的薄膜材料拉伸测试系统的适当性和准确性，这些薄膜材料是微机电系统（MEMS）的主要结构材料。 ）、微型机械和类似设备。本国际标准基于这样的理念：当预先确定的标准试件的拉伸强度所测得的拉伸强度在指定范围内时，拉伸测试系统的适当性和准确性就能得到保证。它还指定了测试件，以尽量减少测试件之间的特性偏差。 [外文原描述]： Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.