标准摘要
[中文适用范围]： 本部分IEC 62047规定了用于微传感器和微执行器的压电薄膜的机电转换特性的测量方法，以及确定压电器件在消费、工业或其他应用中的特性参数的报告模式。本文件适用于通过MEMS工艺制造的压电薄膜。 [外文原描述]： IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process
英文名称Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film