标准摘要
[中文适用范围]： IEC 62047的本部分规定了MEMS谐振器非线性振动的测试方法和测试条件。本文件中的陈述适用于 MEMS 谐振器的开发和制造。 [外文原描述]： IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators