半导体器件微机电器件第36部分:MEMS压电薄膜的环境和介电耐受试验方法

[中文适用范围]： IEC 62047的本部分规定了评估MEMS压电薄膜材料在温度和湿度环境应力以及电应力@下的耐久性的测试方法以及适当质量评估的测试条件。本文件特别规定了测量 DUT 在温度和湿度条件以及施加电压下的耐久性的测试方法和测试条件。它进一步适用于评估主要在硅基板上形成的压电薄膜的逆压电特性@即用作致动器的压电薄膜。本文件不涵盖可靠性评估@，例如基于威布尔分布预测压电薄膜寿命的方法。 [外文原描述]： IEC 62047-36:2019 (E) specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document specifies test methods and test conditions for measuring the durability of a DUT under temperature and humidity conditions and applied voltages. It further applies to evaluations of converse piezoelectric properties in piezoelectric thin films formed primarily on silicon substrates, i.e., piezoelectric thin films used as actuators. This document does not cover reliability assessments, such as methods of predicting the lifetime of a piezoelectric thin film based on a Weibull distribution.