标准摘要
[中文适用范围]： IEC 62047 的这一部分描述了由半导体制成的微机电系统 (MEMS) 的通用规范，这是本系列其他部分针对各种类型 MEMS 应用（例如传感器、RF MEMS，不包括光学 MEMS）给出的规范的基础。生物 MEMS、微型 TAS 和功率 MEMS。该标准规定了 IECQ-CECC 系统中使用的质量评估的一般程序，并建立了描述和测试电气、光学、机械和环境特性的一般原则。 IEC 62047 的这一部分有助于制定定义微加工技术制造的设备和系统的标准，包括但不限于材料表征和处理、组装和测试、过程控制和测量方法。该标准中描述的MEMS基本上由半导体材料制成。然而，本标准中的陈述也适用于使用半导体以外材料的MEMS，例如聚合物、玻璃、金属和陶瓷材料。 [外文原描述]： IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS