半导体器件 微机电设备 第4部分：MEMS通用规范

[中文适用范围]： IEC 62047-4:2026 RLV 包含官方的 IEC 国际标准及其红线版本。红线版本仅提供英文版，便于用户快速、直观地比较现行 IEC 标准与前一版之间的所有变更。IEC 62047-4:2026 描述了由半导体制造的微机电系统（MEMS）的通用规范，这些规范为本系列其他部分中针对各种 MEMS 应用（如传感器、射频 MEMS、光学 MEMS、生物 MEMS、微流控芯片和功率 MEMS）所给出的规范奠定了基础。本文件规定了质量评估的一般程序，并建立了描述和测试电气、光学、机械和环境特性的通用原则。IEC 62047 的本部分有助于制定定义通过微加工技术制造的设备和系统的标准，包括但不限于材料表征与处理、组装与测试、过程控制与测量方法。本文档中所描述的 MEMS 基本上是采用半导体材料制造的。然而，本文档中的陈述也适用于采用非半导体材料（如聚合物、玻璃、金属和陶瓷材料）制造的 MEMS。本版相对于前一版的重要技术变更包括：a) 在范围中增加了光学 MEMS、生物 MEMS、微流控芯片和功率 MEMS 等多种 MEMS 应用；b) 表 1 中的 MEMS 分类和术语略有修改，例如新增了消费电子和汽车应用技术类别。 [外文原描述]： IEC 62047-4:2026 RLV contains both the official IEC International Standard and its Redline version. The Redline version is available in English only and provides you with a quick and easy way to compare all the changes between the official IEC Standard and its previous edition. IEC 62047-4:2026 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, optical MEMS, bio-MEMS, micro TAS, and power MEMS. This document specifies general procedures for quality assessment and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. This part of IEC 62047 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this document are basically made of semiconductor material. However, the statements made in this document are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials. This edition includes the following significant technical changes with respect to the previous edition: a) in the Scope, optical MEMS, bio-MEMS, micro TAS, and power MEMS for various types of MEMS applications were included; b) MEMS categories and terms in Table 1 were slightly modified such consumer electronics and automotive were added that in application technology.