标准摘要
[中文适用范围]： 本部分IEC 62047规定了微悬臂梁上压电薄膜机电转换特性的测量方法，这是实际微传感器和微执行器的典型结构。为了获得具有微器件结构的压电薄膜的实际和精确压电系数，本文件报告了确定压电器件在消费、工业或任何其他应用中的特性参数的方案。本文件适用于通过MEMS工艺制造的微悬臂梁上的压电薄膜。 [外文原描述]： IEC 62047-42:2022 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever