标准摘要
[中文适用范围]： 本部分 IEC 62047 规定了用于评估和确定 MEMS（微机电系统）谐振电场敏感器件动态性能的术语、定义和测试方法。它还规定了 MEMS 谐振电场敏感器件动态性能的样品要求和测试设备。本文档中的陈述也适用于具有各种驱动机制（如静电、电热、电磁、压电等）的 MEMS 谐振电场敏感器件。 [外文原描述]： IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric‑field‑sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric‑field‑sensitive devices. The statements made in this document are also applicable to MEMS resonant electric‑field‑sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices