标准摘要
[中文适用范围]： IEC 62047-49:2025 规定了微悬臂梁上压电薄膜的机电转换特性的可靠性测试方法，这种结构是微传感器和微执行器的典型结构。为了评估在工作条件下具有微尺度结构的压电薄膜的压电系数稳定性，本文件报告了确定用于消费、工业或其他应用的压电MEMS器件特征参数的方案。本文件适用于通过MEMS工艺制造的微悬臂梁上的压电薄膜。 [外文原描述]： IEC 62047-49:2025 specifies reliability test methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of micro sensors and micro actuators. In order to estimate the stability of the piezoelectric coefficient of the piezoelectric thin films with microscale structures in the operating conditions, this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric MEMS devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
英文名称Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers