半导体器件 - 微机电系统器件 - 第 52 部分：可拉伸 MEMS 的双轴拉伸测试方法

[中文适用范围]： IEC 62047-52:2026规定了应变型MEMS材料在双轴拉伸变形下，测量器件性能及失效应变的测试方法。典型的应变型MEMS材料包括柔性单晶硅结构、MEMS电路板以及位于可拉伸衬底上的互联MEMS。试样呈十字形，厚度介于1 μm至100 μm之间，与实际器件厚度一致。鉴于失效应变可能因加载条件（如单轴拉伸或等双轴拉伸）而异，该方法对十字形试样施加双轴载荷，并使两个相互垂直的加载方向之间保持可变的应变比。 [外文原描述]： IEC 62047-52:2026 specifies a testing method for measuring device performance and failure strain under biaxial tensile deformation in stretchable MEMS materials. The typical examples of the stretchable MEMS materials are flexible single crystalline silicon structures, MEMS circuit boards, interconnected MEMS on a stretchable substrate. The test piece has a cruciform geometry and the test piece thickness ranges from 1 μm to 100 μm with the same thickness as the actual devices. Since the failure strain can vary depending on loading conditions like uniaxial tension and equi-biaxial tension, a biaxial load is applied to a cruciform test piece with varying strain ratio between two perpendicular loading directions.