半导体装置.微电机装置.第6部分:薄膜材料的轴向疲劳试验方法

[中文适用范围]： 本国际标准规定了长度和宽度小于 1 毫米、厚度在 0.1 微米至 10 微米范围内的薄膜材料，在恒力范围或恒位移范围条件下进行轴向拉伸 - 拉伸力疲劳试验的方法。薄膜是微机电系统（MEMS）和微机器的主要结构材料。MEMS、微机器等的主要结构材料具有特殊特征，如典型尺寸为几微米、材料通过沉积制造、试件通过非机械加工（包括光刻）制造。本国际标准规定了微尺寸光滑试件的轴向力疲劳试验方法，能够保证与这些特殊特征相对应的精度。试验在室温、空气中进行，载荷沿试件纵向轴施加。 [外文原描述]： IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.