半导体装置.微电机装置.第8部分:薄膜的拉力特性测量的带状抗弯试验方法

[中文适用范围]： 该国际标准规定了条带弯曲测试方法，用于测量薄膜的拉伸性能，与传统拉伸测试相比，具有高精度@可重复性@适度的对准和处理工作。该测试方法对厚度在50纳米至几毫米@之间、长宽比（长度与厚度之比）大于300的试件有效。两个固定支架之间的挂条（或桥）广泛应用于MEMS 或微型机器。制造这些条带比传统的拉伸测试件容易得多。测试程序非常简单，很容易实现自动化。该国际标准可用作 MEMS 生产的质量控制测试，因为与传统的拉伸测试相比，其测试吞吐量非常高。 [外文原描述]： IEC 62047-8:2011 specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the conventional tensile test. This testing method is valid for test pieces with a thickness between 50 nm and several mum, and with an aspect ratio (ratio of length to thickness) of more than 300. The hanging strip (or bridge) between two fixed supports are widely adopted in MEMS or micro-machines. It is much easier to fabricate these strips than the conventional tensile test pieces. The test procedures are so simple to be readily automated. This international standard can be utilized as a quality control test for MEMS production since its testing throughput is very high compared to the conventional tensile test.