标准摘要
[中文适用范围]： 该技术报告描述了用于研发和当今产品的各种纳米级触点和纳米互连。本技术报告的目的是确定产品中常见的纳米级触点和纳米互连@，以描述最先进的技术并描述与这些触点相关的一些关键特征和问题。特别是，在第 5 条中讨论的每个纳米级接触或纳米互连中讨论了以下内容？所形成的纳米级接触和互连的类型和配置； ？产品中纳米级接触和互连的要求； ？用于制造纳米级接触和互连的制造技术@工艺@和工艺控制； ？用于量化纳米级接触和纳米互连的表征技术； ？纳米级接触和互连的功能和性能； ？产品中纳米级接触和互连的可靠性；和 ？产品和相关纳米级触点何时上市的预期。该技术报告指出了所讨论的每种技术或纳米材料中纳米级接触和互连的积极和消极特征。这些信息可能有助于产品设计师和研究人员将其他纳米产品推向市场。还指出了纳米级接触和互连的形成和使用的建议。 [外文原描述]： IEC/TR 62632:2013(E), which is a technical report, describes a variety of nanoscale contacts and nano-interconnects used in research and development and in present-day products. The intent of this technical report is to identify nanoscale contacts and nano-interconnects that will be common in products, to describe the state-of-the-art and to describe some key features and issues related to these contacts. In particular, the following aspects are discussed for each of the nanoscale contacts or nano-interconnects listed: - type and configuration of the nanoscale contacts and interconnects formed; - requirements of the nanoscale contacts and interconnects in products; - fabrication technologies, processes, and process controls used to make the nanoscale contacts and interconnects; - characterization techniques used to quantify nanoscale contacts and nano-interconnects; - functionality and performance of nanoscale contacts and interconnects; - reliability of the nanoscale contacts and interconnects in products; - and expectations of when the product and the associated nanoscale contacts will reach the market. This technical report points out the positive and negative characteristics of the nanoscale contacts and interconnects in each technology or nanomaterial discussed. This information may be helpful to product designers and researchers in their efforts to bring other nano-enabled products to the market. Recommendations for the formation and use of nanoscale contacts and interconnects are also indicated. Key words: nanotechnology, nanocontact, nano-contact
英文名称Nanoscale electrical contacts and interconnects