标准摘要
[中文适用范围]： 本文件是一份技术报告，侧重于椭偏仪评估纳米级薄膜厚度的实用协议。本文件不包括任何椭偏仪的规格，但建议如何最小化数据变化以提高数据可重复性。本文件包括： - 椭偏仪程序的概述， - 结果解释方法和数据分析讨论， - 案例研究。 [外文原描述]： IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
英文名称Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films