纳米制造 关键控制特性 第6-23部分：石墨烯相关产品 方块电阻、载流子密度、载流子迁移率：霍尔棒法

[中文适用范围]： IEC TS 62607-6-23:2025是一项技术规范，规定了确定关键控制特性（KCC）的标准方法：通过霍尔测量法，测定石墨烯薄膜的载流子迁移率和方块电阻。载流子迁移率通过霍尔系数与电导率的乘积得出，方块电阻通过纵向电阻与霍尔器件的长宽比的乘积得出。该方法适用于长度和宽度均大于100微米的石墨烯薄膜霍尔器件。本文件旨在使用成本效益高的工艺和设备完成器件的制造和测量。由于光刻工艺和设备的成本高且性价比低，本文件不采用光刻工艺和设备。 [外文原描述]： IEC TS 62607-6-23:2025, which is a Technical Specification, establishes a standardized method to determine the key control characteristic (KCC): • carrier mobility and sheet resistance for graphene thin films by: • Hall measurement. The carrier mobility is derived by the product of the Hall coefficient and the electric conductivity and the sheet resistance is derived by the product of the longitudinal resistance and the aspect ratio of a Hall device. • The method is applicable for graphene thin film Hall devices with length and width greater than 100 micrometers. The document is developed to complete the fabrication and measurement of devices using cost-effective processes and equipment. Due to the high cost and low cost-performance ratio of photolithography processes and equipment, this document does not utilize photolithography processes and equipment.