纳米制造 关键控制特性 第 6-4 部分：石墨烯基材料 表面电导：非接触式微波谐振腔法

[中文适用范围]： 本部分 IEC 62607 建立了通过非接触式微波谐振腔法测定石墨烯和石墨烯基材料薄膜的关键控制特性表面电导率的标准化方法。该方法通过监测样品插入微波腔时微波谐振频率的偏移和腔的品质因数变化来测量样品表面积。该方法适用于通过化学气相沉积（CVD）在金属基底上合成的石墨烯材料、在碳化硅（SiC）上外延生长的石墨烯材料、从还原氧化石墨烯（rGO）获得的石墨烯材料或从石墨机械剥离的石墨烯材料。该测量不明确依赖于纳米碳层的厚度。 [外文原描述]： IEC TS 62607-6-4:2024 has been prepared by IEC technical committee 113: Nanotechnology for electrotechnical products and systems. It is a Technical Specification. This second edition cancels and replaces the first edition published in 2016. This edition constitutes a technical revision. This edition includes the following significant technical changes with respect to the previous edition: a) changed the document title to better reflect its purpose and application: old title: Graphene – Surface conductance measurement using resonant cavity new title: Graphene based materials – Surface conductance: non-contact microwave resonant cavity method. b) replaced former Figure 1 with new Figure 1 and Figure 2, to better illustrate the method’s fundamentals and its implementation for a non-technical reader. This part of IEC 62607 establishes a standardized method to determine the key control characteristic a) surface conductance for films of graphene and graphene-based materials by the b) non-contact microwave resonant cavity method The non-contact microwave resonant cavity method monitors the microwave resonant frequency shifts and changes in the cavity’s quality factor during the insertion of the specimen into the microwave cavity, as a function of the specimen surface area. The empty cavity is an air-filled standard R100 rectangular waveguide operated at one of the resonant frequency modes, typically at 7,5 GHz [4]. 1) The method is applicable for graphene materials which are synthesized by chemical vapour deposition (CVD) on metal substrates, epitaxial growth on silicon carbide (SiC), obtained from reduced graphene oxide (rGO), or mechanically exfoliated from graphite [5]. 2) This measurement does not explicitly depend on the thickness of the nano-carbon layer. The thickness of the specimen does not need to be known, but it is assumed that the lateral dimensions are uniform over the specimen area. NOTE In some countries, the R100 standard waveguide is referenced as WR-90.