制造 关键控制特性 第6-5部分：石墨烯基材料 接触电阻和薄层电阻：传输线测量

[中文适用范围]： 本部分IEC TS 62607建立了一种标准化方法，用于通过传输线测量确定石墨烯基材料和其他二维材料的关键控制特性：接触电阻和薄层电阻。该方法使用通过光刻方法应用于2D材料的测试结构，该结构由几个金属电极组成，电极之间的间距逐渐增加。通过测量不同电极对之间的电压降，可以计算薄层电阻和接触电阻。该方法适用于任何其他在材料顶部具有电金属接触的二维材料。如果二维材料与金属电极之间形成的电接触提供欧姆接触特性，该方法可提供准确且可重复的结果。 [外文原描述]： IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics contact resistance, and sheet resistance for graphene-based materials and other two-dimensional materials by a transmission line measurement. The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated. The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials. The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.