纳米技术 人造光栅尺寸质量参数的描述和测量

[中文适用范围]： 本技术规范规定了人工光栅的全局和局部质量参数的通用术语，这些参数解释为光栅特征相对于标称位置的偏差，并提供了用于确定这些参数的测量和评估方法的分类指南。本规范旨在促进处理纳米技术中使用的具有尺寸质量参数的人工光栅的制造商、用户和校准实验室之间的沟通。本规范支持纳米技术不同应用领域中人工光栅生产和使用的质量保证。虽然所述定义和方法适用于各种各样的光栅，但重点是一维（1D）和二维（2D）光栅。 [外文原描述]： IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.