标准摘要
[中文适用范围]： IEC TS 62876-3-2:2026《技术规格书》确立了一种基于椭偏仪测定石墨烯体积分数的标准化方法。在稳定性测试前后，通过椭偏仪对薄膜的厚度与成分进行评估，并结合模型计算得出石墨烯的体积分数。由于该方法具有非破坏性，适用于生产线中石墨烯薄膜的可靠性与耐久性评估。例如，在半导体工程中使用石墨烯包覆的铜互连结构时，可据此评估其包覆层的可靠性与耐久性。此外，该方法亦可用于气体传感器、气体阻隔膜及太阳能电池透明电极等领域的研究与开发。该技术适用于对石墨烯体积分数进行非破坏性、定量评估，以判断其可靠性与耐久性。 [外文原描述]： IEC TS 62876-3-2:2026 which is a Technical Specification, establishes a standardized method to determine • volume fraction for graphene by • ellipsometry. Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non‑destructive, it can be used to assess the reliability and durability of graphene films on production lines. • For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated. • Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed. • This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.
英文名称Nanomanufacturing - Reliability and durability assessment - Part 3-2: Graphene - Ellipsometry measurement of graphene