标准摘要
[中文适用范围]： IEC TS 62876-3-4:2025 是一项技术规范，旨在建立标准化的指南，用于评估使用二维纳米材料的欧姆接触场效应晶体管（FET）的金属界面可靠性。该指南通过量化具有不同范德华（vdW）界面材料组合器件的电流-电压（I-V）输出曲线的线性度，来评估可靠性。对于由二维材料（如石墨烯、MoS2、MoTe2、WS2、WSe2 等）和金属（如钛、铬、金、钯、铟、锑等）构成的金属界面，其欧姆接触的可靠性进行了量化。对于以二维材料为基础通道（如 MoS2、MoTe2、WS2、WSe2 等）构成的场效应晶体管，当接触金属、通道长度、通道厚度、施加电压和表面处理条件变化时，欧姆接触的可靠性也进行了量化。通过在较长时间内测量I-V特性的线性度，可以量化金属接触的可靠性。 [外文原描述]： IEC TS 62876-3-4:2025, which is a Technical Specification, establishes a standardized guideline to assess • reliability of metallic interfaces of Ohmic-contacted field-effect transistors (FETs) using 2D nano-materials by quantifying • linearity of current-voltage (I-V) output curves for devices with various materials combinations of van der Waals (vdW) interfaces. For metallic interfaces with 2D materials (eg. graphene, MoS2, MoTe2, WS2, WSe2, etc) and metals (eg. Ti, Cr, Au, Pd, In, Sb, etc), the reliability of Ohmic contact is quantified. For FETs consisting of 2D materials-based channels (eg. MoS2, MoTe2, WS2, WSe2, etc), the reliability of Ohmic contact when varying contacting metal, channel length, channel thickness, applied voltage, and surface treatment condition is quantified. The reliability of the metallic contacts is quantified from the linearity of I-V characteristics measured over extended time periods.
英文名称Nanomanufacturing - Reliability assessment - Part 3-4: Linearity of output characteristics for metal contacted 2D semiconductor devices