标准摘要
[中文适用范围]： 本国际标准定义了表征扫描探针显微镜 (SPM) 仪器在 X 和 Y 方向上的漂移率的术语并规定了测量方法，以及对于测量形貌的 SPM 仪器在 Z 方向上的漂移率。 尽管长期漂移率的行为可能是非线性的，但长期漂移率的行为以及用户定义的稳定时间之后的短期漂移率的行为都可以通过典型平均漂移率或典型最大漂移率来表征。 本国际标准适用于基于SPM图像评估漂移率。 它旨在帮助制造商以有意义且一致的方式引用规格中的漂移数据，并帮助用户表征漂移行为，以便设计有效的实验。 这些测量并不是为图像校正而设计的。 [外文原描述]： ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates. This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.
英文名称Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate