标准摘要
[中文适用范围]： 本文件规定了辉光放电光学发射光谱法（GD-OES）测定表面层薄膜厚度、单位面积质量和化学成分的方法。本文件的适用范围仅限于描述GD-OES成分深度剖析中化学成分和厚度定量的一般程序。本文件不直接适用于具有不同厚度和待测元素的个别材料的定量分析。 [外文原描述]： This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films. The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.
英文名称Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry