标准摘要
[中文适用范围]： 本国际标准提供了使用波长色散光谱法进行电子微探针元素图分析的程序。 评估电子束在样本上以数字方式移动的测绘（电子束测绘）和仅使用载物台移动的测绘（大面积测绘）之间的选择。 它描述了五种数据处理类型：原始X射线强度数据法、k值法、校准法、相关法和矩阵校正法。 [外文原描述]： This International Standard provides procedures for electron microprobe elemental-mapping analysis using wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method, the calibration method, the correlation method and the matrix correction method.
英文名称Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy