表面化学分析.扫描探针显微镜.用SPM测定几何量:测量系统的校准

[中文适用范围]： 本文件规定了用于在最高水平上测量几何量的扫描探针显微镜（SPM）扫描轴的特性化和校准方法。它适用于提供进一步校准的人，并不适用于可能需要较低水平校准的一般工业用途。本文件具有以下目标：——通过追溯到长度单位，提高使用 SPM 进行的几何量测量的可比性；——定义校准过程的最低要求和验收条件；——确定仪器的校准能力（为仪器分配“校准能力”类别）；——定义校准范围（测量条件和环境、测量范围、时间稳定性、可转移性）；——根据 ISO/IEC 指南 98-3 提供一个模型，用于计算使用 SPM 进行测量时简单几何量的不确定度；——定义报告结果的要求。 [外文原描述]： This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This document has the following objectives: — to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length; — to define the minimum requirements for the calibration process and the conditions of acceptance; — to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument); — to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); — to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM; — to define the requirements for reporting results.