标准摘要
[中文适用范围]： 该国际标准描述了测量扫描电容显微镜（SCM）或扫描扩散电阻显微镜（SSRM）空间（横向）分辨率的方法，这些显微镜广泛用于半导体器件中载流子分布和其他电特性的成像。 该方法涉及使用锋利的人工制品。 [外文原描述]： ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
英文名称Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes