标准摘要
[中文适用范围]： 本文件规定了一种优化用于一般分析目的的飞行时间二次离子质谱仪中质量校准精度的方法。本文件仅适用于飞行时间仪器，但不限于任何特定的仪器设计。本文件为可使用此程序优化的部分仪器参数以及适合校准质量标尺以获得最佳质量精度的通用峰类型提供了指导。 [外文原描述]： This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. This document is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. This document gives guidance for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.
英文名称Surface chemical analysis — Mass spectrometries — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer