表面化学分析. 原子力显微镜学. 纳米结构测量用AFM探针柄轮廓的现场鉴定程序

[中文适用范围]： 本国际标准规定了两种表征 AFM 探针尖端形状的方法，特别是柄部和近似尖端轮廓。 这些方法将 AFM 探针尖端的轮廓投影到给定的平面上，并且在定义的操作条件下探针柄的特性也投影到该平面上。 后者表明给定探头在狭窄沟槽和类似剖面中的深度测量的有用性。 本国际标准适用于半径大于50的探头，其中uo是用于表征探头的参考样品中脊结构宽度的不确定度。 [外文原描述]： ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5 u 0 , where u 0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.