标准摘要
[中文适用范围]： 本国际标准定义了与四极杆质谱仪 (QMS) 相关的术语，并规定了 QMS 制造商为正确校准和保持分压测量质量所需的规范参数。本国际标准适用于具有电子轰击电离型离子源的 QMS。此类 QMS 专为测量原子质荷比 m/z 而设计，通常 [外文原描述]： ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m /z typically <300. QMSs with other ion sources, such as those of the chemical ionization, photoionization, and field ionization types, as well as the measurements of m /z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.
英文名称Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers