微束分析.电子探针微分析.波长色散光谱实验参数测定指南

[中文适用范围]： 本文件给出了确定与电子探针、波长光谱仪和样品有关的实验参数的一般指导原则，这些参数在进行电子探针微分析时需要考虑。它还定义了确定探针电流、探针直径、死时间、波长分辨率、背景、分析面积、分析深度和分析体积的程序。本文件适用于使用法向光束入射对抛光良好的样品进行分析。本文件不适用于能量色散 X 射线光谱法。 [外文原描述]： This document gives general guidelines for the determination of experimental parameters relating to the electron probe, the wavelength spectrometer, and the specimen that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of probe current, probe diameter, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume. This document is applicable for the analysis of a well-polished specimen using normal beam incidence. This document does not apply to energy dispersive X-ray spectroscopy.