标准摘要
[中文适用范围]： 本文件提供了使用适当的单层和多层参考材料优化溅射深度分析参数的指导和要求，以便根据俄歇电子能谱、X射线光电子能谱和二次分析中的仪器设置实现最佳深度分辨率。 离子质谱法。 本文件无意涵盖特殊多层系统（例如δ掺杂层）的使用。 [外文原描述]： This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This document is not intended to cover the use of special multilayered systems such as delta doped layers.
英文名称Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials