标准摘要
[中文适用范围]： 本部分ISO 14644规定了洁净室和洁净区以及隔离装置（如ISO 14644-7中定义）的空气洁净度分类，依据是空气中颗粒的浓度。分类仅考虑基于阈值（下限）粒径从0.1μm到5μm的颗粒群。使用光散射（离散） airborne 粒子计数器（LSAPC）是确定指定采样位置处等于和大于指定粒径的 airborne 粒子浓度的基础。本部分ISO 14644不规定指定下限粒径范围（0.1μm至5μm）之外的颗粒群的分类。小于0.1μm的超细粒子的浓度将在另一项标准中解决，用于规定纳米级粒子的空气洁净度。可以使用M描述符（见附录C）来量化大于5μm的大粒子的种群。本部分ISO 14644不能用于表征 airborne 粒子的物理、化学、辐射、可生物污染或其他性质。 [外文原描述]： ISO 14644-1:2015 specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644‑7. Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0,1 µm to 5 µm are considered for classification purposes. The use of light scattering (discrete) airborne particle counters (LSAPC) is the basis for determination of the concentration of airborne particles, equal to and greater than the specified sizes, at designated sampling locations. ISO 14644-1:2015 does not provide for classification of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1 µm) will be addressed in a separate standard to specify air cleanliness by nano-scale particles. An M descriptor (see Annex C) may be used to quantify populations of macroparticles (particles larger than 5 µm). ISO 14644-1:2015 cannot be used to characterize the physical, chemical, radiological, viable or other nature of airborne particles.
英文名称Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration