洁净室和相关受控环境.第10部分:化学污染表面清洁度的评定

[中文适用范围]： 本文件建立了适当的测试流程，以确定洁净室表面的清洁度，以确定是否存在化合物或元素（包括分子、离子、原子和颗粒）。 本文件适用于洁净室和相关受控环境中的所有固体表面，例如墙壁、天花板、地板、工作表面、工具、设备和装置。 注 1：出于本文件的目的，仅考虑颗粒的化学特性。 没有考虑颗粒的物理特性，并且本文件没有涵盖污染物和表面之间的相互作用。 注2：本文件不包括污染产生过程或任何与时间相关的影响（例如沉积、沉降、老化）或与过程相关的活动（例如运输和装卸）。 它也不包括有关统计质量控制技术的指导，以确保合规性。 [外文原描述]： This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.