洁净室和相关控制环境.第12部分：通过纳米颗粒浓度监测空气清洁度的规范

[中文适用范围]： 本文件涵盖了通过空气中纳米级粒子浓度来监测空气洁净度的方法。出于监测目的，仅考虑尺寸下限为 0.1 微米（100 纳米）或更小（“纳米级”）的粒子群。本文件中给出的监测主要用于“运行”状态。注 1 就本文件而言，“纳米级粒子”是指所有具有一维（纳米板）、二维（纳米纤维）或三维（纳米粒子）纳米级尺寸的纳米物体。注 2 因此，用于监测运行状态下洁净室纳米级粒子浓度空气洁净度的规范还考虑了过程细节，例如所用设备、人员行为等。注 3 本文件不考虑健康和安全因素。 [外文原描述]： This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.