标准摘要
[中文适用范围]： 适用范围：本标准提供了洁净室表面、洁净室设备表面及洁净室材料表面达到规定清洁程度的清洗指南，涵盖所有相关的内、外表面。标准就如何通过粒子浓度（SCP）和化学浓度（SCC）评估清洗方法以达到所需的表面清洁度，以及应采用的相关技术提供指导。清洗方法的适用性将参考ISO 14644-9和ISO 14644-10中规定的清洁度等级及相应的测试方法。 本标准提供以下方面的通用指导：预期表面清洁度等级；清洗方法的适用性；表面与清洗技术之间的兼容性；清洗适用性的评估。 以下各项不在本标准范围内：清洗方法的分类；洁净室内生产的产品；与特定表面相关的清洗方法；各类清洗方法的机制、方法及程序的详细描述；详细的材料特性；清洗过程及时间依赖效应造成的损伤机制描述；污染物与表面之间相互作用力或通常具有时间依赖性和工艺依赖性的生成过程的参考；颗粒的其他特性（如静电荷、离子电荷等）；分子污染物与表面之间的化学反应；表面清洁度的微生物学方面；污染的放射性方面；健康与安全考虑；环境方面（如废弃物处置、排放等）；统计方法的选择与使用。 [外文原描述]： This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) levels and which techniques should be considered to achieve these specified levels. The appropriateness of cleaning techniques will make reference to the cleanliness levels and associated test methods found in ISO 14644-9 and ISO 14644-10. The document gives general guidance on the following: expected surface cleanliness levels; suitability of cleaning methods; compatibility of surfaces with the cleaning technique; assessment of cleaning appropriateness. The following are excluded from this document: classification of cleaning methods; product produced within a cleanroom; specific surface-related cleaning methods; detailed description of cleaning mechanisms, methods and procedures of various cleaning methods; detailed material characteristics; description of damage mechanisms by cleaning processes and time-dependent effects; references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent; other characteristics of particles such as electrostatic charge, ionic charges, etc.; chemical reactions between molecular contaminants and surfaces; microbiological aspects of surface cleanliness; radioactive aspects of contamination; health and safety considerations; environmental aspects such as waste disposal, emissions, etc.; selection and use of statistical methods.
英文名称Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration