标准摘要
[中文适用范围]： 本部分规定了洁净室或洁净区基于测量或影响空气中颗粒浓度的参数的监控计划的最小要求。本部分不解决振动或一般工程系统维护等方面的条件监控。它不提供针对低于指定下限粒径范围（0.1 μm至5 μm）之外的颗粒群的监控。超细粒子（小于0.1 μm）的浓度将在另一项标准中解决。 [外文原描述]： ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
英文名称Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration