洁净室和相关的受控环境 - 第3部分:测试方法

[中文适用范围]： 本文件提供了支持洁净室和洁净区运行的测试方法，以满足空气洁净度分类、其他洁净度属性和相关受控条件的要求。 性能测试针对两种类型的洁净室和洁净区：具有单向气流的洁净室和洁净区和具有非单向气流的洁净室和洁净区，并在三种可能的占用状态下进行：竣工状态、静止状态和运行状态。 提供了用于确定性能参数的测试方法、推荐的测试设备和测试程序。 如果测试方法受到洁净室或洁净区类型的影响，建议采用替代程序。 对于某些测试，建议使用几种不同的方法和设备来适应不同的最终用途考虑因素。 经客户和供应商同意，可以使用本文件中未包含的替代方法。 替代方法不一定提供等效的测量结果。 本文件不适用于洁净室、洁净区或独立设备中的产品或过程的测量。 注：本文件无意解决与其使用相关的安全注意事项（例如，使用危险材料、操作和设备时）。 本文件的用户有责任建立适当的安全和健康实践，并在使用前确定监管限制的适用性。 [外文原描述]： This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices. NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.