标准摘要
[中文适用范围]: 本文件建立了典型的评估流程,以确定洁净室和相关受控环境中空气化学清洁度(ACC)的分级水平,根据特定化学物质(个体、群体或类别)的空气浓度,并提供了包括测试方法、分析和时间加权因素来确定。 本文件目前仅考虑洁净室操作条件下空气化学污染物浓度在 100 g/m3 至 10−12 g/m3 之间。 本文件不适用于空气中化学物质的存在不被视为对产品或过程构成风险的行业、过程或生产。 本文件的目的不是描述空气化学污染物的性质。 本文件没有给出表面化学污染的分类。 [外文原描述]: This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 10 0 g/m 3 and 10 −12 g/m 3 under cleanroom operational conditions. This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of this document to describe the nature of air chemical contaminants. This document does not give a classification of surface chemical contamination.
英文名称Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)