洁净室和相关受控环境.第9部分:颗粒浓度的表面清洁度评定

[中文适用范围]： 本文件建立了评估洁净室和相关受控环境应用中固体表面颗粒清洁度水平的程序。 附件 A 至 D 中给出了有关测试和测量方法的建议以及有关表面特性的信息。 本文件适用于洁净室和相关受控环境中的所有固体表面，例如墙壁、天花板、地板、工作环境、工具、设备和产品。 通过颗粒浓度 (SCP) 评估表面清洁度的程序仅限于 0.05 µm 至 500 µm 之间的颗粒。 本文件不考虑以下问题： ——特定工艺的表面清洁度和适用性要求； ——表面清洁程序； ——材料特性； ——涉及通常与时间和过程相关的相互作用的结合力或生成过程； ——评估和测试统计方法的选择和使用； ——颗粒的其他特征，例如静电荷、离子电荷和微生物状态。 [外文原描述]： This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm. The following issues are not considered in this document: — requirements for the cleanliness and suitability of surfaces for specific processes; — procedures for the cleaning of surfaces; — material characteristics; — references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; — selection and use of statistical methods for assessment and testing; — other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.