标准摘要
[中文适用范围]： 本文件旨在允许用户定期评估 X 射线光电子能谱仪的几个关键参数。 它并非旨在提供详尽的性能检查，而是提供一组可以经常进行的快速测试。 本文件涵盖的仪器行为方面包括真空、导电或非导电测试样本的光谱测量以及 X 射线源的当前状态。 仪器性能的其他重要方面（例如横向分辨率）不属于本文件的范围。 该文件旨在与配备单色 Al Kα X 射线源或非单色 Al 或 Mg Kα X 射线源的商用 X 射线光电子能谱仪一起使用。 [外文原描述]： This document is designed to allow the user to assess, on a regular basis, several key parameters of an X‑ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently. Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X‑ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document. The document is intended for use with commercial X‑ray photoelectron spectrometers equipped with a monochromated Al Kα X‑ray source or with an unmonochromated Al or Mg Kα X‑ray source.
英文名称Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer