标准摘要
[中文适用范围]： 本文件规定了一种用于校准不确定度为 3 eV 的俄歇电子能谱仪动能标度的方法，可用于一般分析中识别表面元素。本文件还规定了一种建立校准计划的方法。它适用于直接或差分模式下使用的仪器，其中分辨率小于或等于 0.5%，如果使用差分模式，则调制幅度为 2 eV 峰峰值。它适用于配备惰性气体离子枪或其他样品清洁方法以及能够在 4 keV 或更高束流能量下工作的电子枪的光谱仪。 [外文原描述]： This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
英文名称Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis