表面化学分析.高分辨率螺旋电子光谱仪.元素和化学状态分析用能量标度的校准

[中文适用范围]： 本国际标准规定了用于表面元素和化学状态分析的俄歇电子能谱仪动能标度的校准方法。 它还指定了一个校准计划，用于测试一种中间能量下的动能标度线性度，用于确认一个低动能值和一个高动能值下的标度校准的不确定度，用于校正该标度的小漂移以及定义扩展的不确定度动能标度的校准，置信度为 95%（这种不确定性包括实验室间研究中观察到的行为的贡献，但不涵盖所有可能的缺陷）。 它仅适用于那些配有离子枪进行溅射清洁的仪器。 它不适用于动能标度误差与能量呈显着非线性关系的仪器。 它既不适用于在恒定 ΔEIE 模式下相对分辨率低于 0.2 % 或在恒定 ΔE 模式下低于 1.5 eV 的仪器，也不适用于要求容差限值为 ±0.05 eV 或更低的仪器，也不适用于那些要求 ±0.05 eV 或更小的仪器。 那些带有不能在 5 keV 至 10 keV 能量范围内操作的电子枪的电子枪。 它不提供完整的校准检查来确认能量标尺上每个可寻址点测量的能量，这是根据制造商的建议执行的。 [外文原描述]： ISO 17974:2002 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and defining the expanded uncertainty of the calibration of the kinetic energy scale for a confidence level of 95 % (with this uncertainty including contributions for behaviours observed in interlaboratory studies but not covering all possible defects). It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy, those operated at relative resolutions poorer than 0,2 % in the constant delta E/E mode or 1,5 eV in the constant delta E mode, those requiring tolerance limits of plus or minus 0,05 eV or less, nor those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.